Erhältlich:
Nicht auf Lager
Buch (Softcover): Fachbuch
Advanced MEMS/NEMS Fabrication and Sensors
Produkt bewerten
Verlag:
Springer Verlag Unsere-Artikel-Nr.: PLL9967
EAN: 9783030797515
Erhältlich:
Nicht auf Lager
Zustellung: Mi, 05.08.2026
Versand: Kostenlos
-10.1 %
CHF 188.–
CHF 169.–
Beschreibung
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors;. Covers a broad spectrum of sensor applications;. Written by leading experts in the field.
Spezifikationen
Sprache
- Englisch
Autor
- Zhuoqing Yang
Thema
- Forschung: Kybernetik & Systemtheorie
- Maschinenbau: Materialwissenschaft
- Elektronik: Allgemein
Erscheinungsjahr
- 2022
Erscheinungsland
- Schweiz
Format
- Buch (Softcover)
Anzahl Seiten
- 320