Erhältlich:
Nicht auf Lager
Buch (Hardcover): Fachbuch
Microstereolithography and other Fabrication Techniques for 3D MEMS
Verlag:
John Wiley & Sons Unsere-Artikel-Nr.: P35888230
EAN: 9780471521853
Erhältlich:
Nicht auf Lager
Zustellung: Fr, 25.09.2026
Versand: Kostenlos
-28.5 %
CHF 340.–
CHF 243.–
Beschreibung
The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communication is booming. Focusing on microstereolithography, this timely work provides insight into state-of-the-art microfabrication techniques for 3D microstructures, microdevices and MEMS. A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units. Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding. Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers Microelectronics engineers will profit form this detailed overview of current technologies. Material technologists and physicists working in industrial and academic research and development will also find this a valuable reference source.
Spezifikationen
Sprache
- Englisch
Autor
- Varadan Vijay K.
- Jiang Xiaoning
- V. V. Varadan
Erscheinungsjahr
- 2001
Format
- Buch (Hardcover)
Anzahl Seiten
- 272