Photon Sources for Lithography and Metrology

Produkt bewerten

Vivek Bakshi

Verlag:

SPIE Press

Unsere-Artikel-Nr.: P34863209

EAN: 9781510653719

Erhältlich:

Nicht auf Lager

Zustellung: Fr, 21.08.2026

Versand: Kostenlos

-21.8 %

CHF 229.–

CHF 179.–

Beschreibung

Photon sources enable the extension of lithography and metrology technologies forcontinued scaling of circuit elements and therefore are the key drivers for the extension of Moore's law. This volume is the authoritative reference on photon source technology and includes contributions from leading researchers and suppliers in the field.